基于白光干涉仪的轴尖表面粗糙度检测技术研究

Research on Measurement for Roughness of Pivots Based on White Light Interferometer

针对轴尖微小球面表面粗糙度的检测难题,开发了基于Taylor CCI白光干涉仪的检测技术。以VLSI 18nm台阶高度标准片对仪器进行针对性的高度测量校准,并以专门制备的R_a12nm多刻线样板进行粗糙度测量精度验证,在此过程中同时对仪器的工作参数进行优化调整,包括采用二阶多项式算法去除表面形状对测量结果的影响等。实测数据和测量不确定度分析的结果证明达到了不确定度R_a2nm的精度水平,实现了轴尖表面粗糙度的准确测量。

Aiming at the problem to measure the roughness of micro spherical surface of the pivots, the measurement method based on the Taylor CCI white light interferometer is developed. The instrument was calibrated with the VLSI 18 nm step height standard template, and the roughness measurement accuracy was verified with the specially prepared R_a12nm multi-line template. During this process, the working parameters of the instrument were optimized and adjusted, including the use of second-order polynomial algorithm to remove the influence of surface form on the measurement results. The measured data and the measurement uncertainty analysis result show that the accuracy level of uncertainty R_a2nm is reached, and the accurate measurement of the surface roughness of the pivots is realized.