线面式电容传感器结构设计与传感特性研究

Research in the Structure Design and Sensing Characteristics of the Filament-surface Capacitive Sensor

提出了一种基于自阻尼垂向测量参考的线面式电容传感器,对垂向运动中的残留水平位移进行精确测量。线面式电容传感器利用细丝电极作为直接垂向测量参考,消除了间接参考在其转换过程包含的系统误差;同时采用细丝末端的液体阻尼器保证细丝电极的稳定性。实验表明:在0.38~0.4 pF范围内,线面式电容传感器的分辨力优于0.05μm,短期稳定性约为0.1μm。

A filament-surface capacitive sensor based on self-damping vertical reference to measure the residual horizontal displacement precisely during the vertical movement is presented.The filament electrode works as a direct vertical reference,which avoids the system error caused by indirect-reference conversion.And the liquid damper in the end of the filament electrode ensures the stability of the capacitive sensor.Experiments show that in the range of 0.38~0.4 pF,the resolution of the filament-surface capacitive sensor is better than 0.05μm,and the short-term stability is approximately 0.1μm.