摘要
微波等离子体无极紫外光源是新一代气体放电光源,在污水处理,固化,医药等各方面都有应用。本文设计了一种双波导缝隙馈波的微波等离子体紫外灯的装置,通过开缝的方式将微波馈入半椭圆腔体来激发紫外灯发光。通过时域有限差分仿真计算验证了该装置具有低互耦和良好的场均匀性。该装置将用于固化实验,其对于以后微波无极紫外灯的设计方法也有一定的指导意义。
Microwave plasma electrodeless ultraviolet light source is a new generation gas discharge light source,which can be used in sewage treatment,curing,medicine and other aspects.In this paper,a double waveguide slot feeding microwave plasma UV lamp is designed.The microwave is fed into the semi-elliptical cavity by slitting to stimulate the UV lamp to emit light.The FDTD(finite difference time domain)simulation results indicate that the device has low mutual coupling and good field uniformity.The device will be used in curing experiments,which is also instructive for future design of microwave electrodeless UV lamps.
作者
易倩玉
朱铧丞
YI Qian-yu;ZHU Hua-cheng(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China)
出处
《真空电子技术》
2019年第6期102-105,共4页
Vacuum Electronics
