调控矢量激光场在表面处理中的应用研究

Application of the manipulated vectorial laser field in surface treatment

为了研究调控矢量激光场在表面处理中的应用,基于Nd∶YAG脉冲调Q激光器,搭建了矢量调控模块,采用选取钛合金和单晶硅进行激光烧蚀打孔实验的方法,对柱对称矢量激光的脉冲次数、光束的偏振态和拓扑荷数对激光表面处理的影响进行了系统研究。结果表明,激光脉冲次数对孔的影响主要集中在孔深和孔径,光束偏振态主要影响孔的圆度和光洁度,拓扑荷数则影响孔底和孔周的光洁度。调控矢量激光作为一种特殊激光,有望在优良材料加工和处理领域获得广泛应用。

In order to study application of the manipulated vector laser field in surface processing,based on Nd∶YAG pulse Q-switched laser,vector control module was built.Laser ablation drilling experiments on titanium alloy and silicon was used to study effect of pulse number of cylindrical symmetric vector laser,the polarization of beam and the topological charge on laser surface treatment.The results show that the influence of laser pulse number on hole is mainly concentrated on hole depth and aperture.The polarization of beam mainly affects the roundness and smoothness of the hole.Topological loads affect the smoothness of the bottom and periphery of the hole.As a special kind of laser,the manipulated vector laser is expected to be widely used in the field of fine material processing.