全光纤声光调制径向跳动差分测量技术研究

Research of radial run-out differential measurement technology with all fiber acousto-optic modulation

为了实现机床在加工状态下主轴径向跳动非接触、高精度的测量,采用光外差法光路的激光多普勒差分检测方法,进行了理论分析和实验验证。直接耦合和透镜耦合的全光纤光路的应用,降低了布喇格衍射光路的调节难度,提高了测量分辨率和抗干扰能力,减小了噪声;光纤分光器实现了同一轴线上的差分测量,抑制了因测量光路本身的振动带来的干扰。得到了相对误差为0.0838%的主轴径向跳动测量结果,实现了纳米级跳动误差测量。结果表明,系统的相对误差和测量不确定度均小于0.1%。该研究对主轴径向跳动的实时测量有一定的指导意义。

In order to realize non-contact and high-precision measurement of the radial run-out of the spindle in the machining state,the laser Doppler differential detection method based on the optical heterodyne method was used for theoretical analysis and experimental verification.The application of direct coupling and lens-coupling all-fiber optical path reduces the adjustment difficulty of the Bragg diffraction optical path,improves the measurement resolution and anti-interference ability,and reduces the noise;the optical fiber splitter realizes the differential measurement on the same axis,suppressing interference caused by the vibration of the measuring optical path itself.The radial run-out measurement result of the spindle with a relative error of 0.0838%is obtained,and the nanometer run-out error measurement is realized.The results show that the relative error and measurement uncertainty of the system are less than 0.1%.This study has a certain guiding significance for the real-time measurement of the radial run-out of the main shafts.