ICP-MS测定电子级过氧化氢中的元素含量

Determination of Element Content in Electronic Grade Hydrogen Peroxide by ICP-MS

研究了利用电感耦合等离子体质谱测定电子级过氧化氢中的痕量元素的含量,用超耐高盐进样系统直接进样,用标准加入法进行检测,不添加内标,避免了在样品检测时的污染问题。通过仪器硬件配置的选择,仪器参数相应的优化,不同元素与检测方法的匹配,更进一步消除了质谱干扰,提高了准确性。方法的检出限为0~7.68 ng/L,加标回收率为89.9%~112.1%,精密度RSD为0.2%~4.9%。本方法简单可靠,适用于电子级过氧化氢中痕量元素的快速测定。

The use of inductively coupled plasma mass spectrometry to determine the content of trace elements in electronic grade hydrogen peroxide was studied.The sample was directly injected using an ultrahigh-salt-tolerant sampling system,and the standard addition method was used for detection.No internal standard was added,which avoided contamination issues during sample testing.Through the selection of the instrument hardware configuration,the corresponding optimization of the instrument parameters,and the matching of different elements and detection methods,the interference of the mass spectrum is further eliminated and the accuracy is improved.The detection limit of the method is 0~7.68 ng/L,the spiked recovery is 89.9%~112.1%and the precision RSD is 0.2%~4.9%.The method is simple and reliable,and is suitable for the rapid determination of trace elements in electronic grade hydrogen peroxide.