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CMOS图像传感器改善灵敏度的工艺研究

Study on the Technology of Improving Sensitivity of CMOS Image Sensor
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摘要 CMOS 图像传感器芯片(CIS)的功能是把光学图像的信号转换为电信号,采集电信号并传输图像信号的器件。CMOS 图像传感器广泛应用于手机数码产品、监控、汽车电子、工业应用、AR/VR、医疗以及科学探测等领域。通过对 CMOS 图像传感器色彩滤镜和微透镜工艺进行研究,介质层工艺改善,色彩滤镜材料改善,滤镜工艺改善,微透镜工艺改善来提升 CMOS 图像传感器的光学吸收效率,达到灵敏度提升的效果。 The function of CMOS image sensor chip (CIS) is to convert the signal of optical image into electrical signal,collect electrical signal and transmit image signal.CMOS image sensor is widely used in mobile digital products,monitoring,automotive electronics,industrial applications,AR / VR,medical and scientific detection fields.Through the research of CMOS image sensor color filter and microlens technology,the improvement of medium layer technology,color filter material,filter technology and microlens technology can improve the optical absorption efficiency of CMOS image sensor and achieve the effect of sensitivity improvement.
作者 叶红波 史海军 YE Hongbo;SHI Haijun(Testing Technology Department of Shanghai IC R&D Center,Shanghai 201203,China.)
出处 《集成电路应用》 2020年第1期23-25,共3页 Application of IC
基金 国家科技重大专题课题(2011ZX02702_004)
关键词 集成电路制造 CMOS图像传感器 色彩滤镜工艺 微透镜工艺 灵敏度 IC manufacturing CMOS image sensor color filter technology microlens technology sensitivity
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