掠入射式超环面反射镜组X射线显微镜设计（英文）

Design of X-ray Microscope Employing Toroid Mirrors Working at Grazing-incidence

为了实现对激光惯性约束聚变中物理过程的诊断,建立了X射线显微成像系统.对该系统所采用的超环面镜成像特性、系统的光学设计、像差分析、公差分析和装调方法进行了研究.首先,以等离子体诊断的要求为依据确定了部分光学系统参数,设计了由U型排布的两个超环面镜和一个用于谱选择的平面镜构成的显微成像系统.根据消像散聚焦初步确定三个反射镜的结构参数,并利用光学设计软件进行了优化.接着,分析了X射线显微镜的球差、彗差、视场倾斜和像散.通过分析系统参数变化对成像质量的影响,根据系统精度要求确定了合理的公差.最后,针对离线超环面镜离轴掠入射装调问题,设计了一种辅助光学系统,并为在线高精度系统装调设计了一种双向双目交汇瞄准系统.实验结果表明:显微成像系统在物方视场500μm处的分辨率优于5μm,基本满足激光等离子体X射线成像的大视场和高分辨等要求.

In order to diagnose the physical process of laser inertial confinement fusion,a X-ray microscope was established.The imaging characteristics of the toroidal mirrors used in the system,optical design and parameter optimization,aberrations and tolerance analysis of the system and alignment were studied.Firstly,based on the requirements of plasma diagnosis,some optical system parameters were determined,and the the microscope for imaging the X-ray through the basic structure of two tandem toroidal mirrors in u-shaped arrangement and one planar mirror for spectrum selection was designed.The structural parameters of the three mirrors were preliminarily determined according to the anastigmatic focusing.Then the optical design software was used for modeling and optimization.The spherical aberration,coma aberration,field obliquity and astigmatism of X-ray microscope were also analyzed.By analyzing the influence of system parameters change on the image quality and the accuracy requirement of the system,reasonable tolerance was established.Finally,An auxiliary aiming system was designed to solve the off-axis problem of grazing incidence mounting of the toroid mirrors when adjusted offline,also a bidirectional binocular intersection online aiming system was designed to solve the problem of assembling and aiming accuracy of the system.Experiment results show that the resolution of the microscope is less than 5μm at 500μm field of view,which basically meets the requirements of large field of view and high resolution in laser plasma hard X-ray imaging.