摘要
本文介绍了用氧-乙炔火焰法在大气下合成金刚石薄膜的实验结果,初步研究了基板温度对金刚石晶体生长速度、结晶习性的影响,指出了在金刚石(111)及(100)晶面上外延单晶金刚石膜的温度范围,还探讨了氧对薄膜的质量均匀性的影响。
This paper presented the experimental results of synthesized diamond film in atmosphere by thecombustion flame of oxyacetylene.The influence of substrate temperature on diamond growth rate and crystalhabit was studied.The temperature range of epitaxial single-crystal diamond film on the(111)and(100)sur-faces of diamond,and the influence of oxygen contents in flame on the homogeneity of diamond film were des-cribed.
基金
国家自然科学基金
58972105
关键词
火焰法
金刚石薄膜
合成
combustion flame
diamond film
substrate temperature.
