基于KRG代理模型的超声悬浮夹具设计

Ultrasonic Suspension Fixture Design Based on KRG surrogate Model

在超精密制造领域,如晶圆、硅片的制造与运输,需要在非接触、超净化条件下进行。为提高非接触式夹具的夹持稳定性,分析了无侧向约束力的超声悬浮夹具存在的不足,设计了一种有侧向约束力的新型超声悬浮夹具。基于KRG代理模型技术,建立了新型超声悬浮夹具的设计模型,并用遗传算法优化了新型超声悬浮夹具的结构参数。为验证新型超声悬浮夹具非接触夹持效果,运用工业视觉测量技术,搭建了试验平台。试验结果表明,新型超声悬浮夹具能够稳定夹持工件。

In the field of ultra-precision manufacturing, such as the fabrication and transportation of wafer and silicon, it needs to be carried out under non-contact and ultra-purification conditions. In order to improve the clamping stability of the non-contact fixture, the shortcomings of the ultrasonic suspension fixture without lateral constraining force are analyzed, and a new type of ultrasonic suspension fixture with lateral constraining force is designed. Based on the KRG surrogate model technology, the new ultrasonic suspension fixture design model was established, and the structural parameters of the new ultrasonic suspension fixture were optimized by genetic algorithm. In order to verify the non-contact clamping effect of the new ultrasonic suspension fixture, a test platform was built using industrial vision measurement technology. The test results show that the new ultrasonic suspension fixture can stably hold the workpiece.