半导体激光器光束匀化系统的光学设计

Optical design of laser diode beam-homogenizing system

为了提高半导体激光器光束的均匀性,设计了非球面与微柱透镜阵列相结合的匀光系统。快轴方向利用光线追迹设计非球面匀化透镜;慢轴方向采用微柱透镜阵列对光束进行分割叠加。半导体激光器输出光束通过该匀光系统,在目标面上可以得到能量匀化的方形光斑。利用Zemax光学软件对半导体激光器单管和阵列进行匀化仿真,验证了该匀化系统应用于半导体激光器整形的可行性,得到了目标面动态范围变化对均匀度的影响程度,研究了微柱透镜阵列间距变化及快轴匀化透镜旋转对光斑均匀度的影响。单管和阵列在输出面上的光斑均匀度均大于90%,能量传输效率分别为95.4%和96.2%。该设计结果对半导体激光器光束匀化具有一定的参考价值。

In order to improve the uniformity of the laser diode beam,a homogenization system combined aspheric and microlens lens array was designed.The aspheric homogenization lens was designed by using ray tracing in the direction of the fast axis,and the microlens array was used to segment and overlay the beam in the slow axis direction.Laser diode output beam passed through the honogenizing system,the energy homogenization of the square spot can be obtained on the target surface.By using Zemax optical software to simulate the single tube and array,the feasibility of the optical system was verified.The influence of target dynamic range change on uniformity was obtained,and the influence of the change of the distance between micro-cylindrical lens arrays and the rotation of fast-axis homogenizing lens on the uniformity was studied.The homogeneity of single tube and laser array on the output surface was over 90%,and the energy efficiency was 95.4%and 96.2%,respectively.The design results have certain reference value for the beam homogenization of laser diode.