化学沉淀-滴定法测定CVD含氟粉尘中氟硅酸铵的含量

Determination of Ammonium Fluorosilicate in Fluorine-containing Dusts Generated by CVD by Chemical Precipitation-titration Method

采用水溶分离-沉淀转化法处理CVD含氟粉尘样品,建立了水解-滴定法测定CVD含氟粉尘中的氟硅酸铵的方法。试验结果显示:该方法的相对标准偏差(n=7)小于1%,加标回收率在96.41%~101.20%之间。方法精密度结果符合要求,对含氟粉尘中氟硅酸铵含量的测定具有很好的可行性和实用性。

A method for the determination of ammonium fluosilicate in fluorine-containing dusts generated by CVD by hydrolysis-titration was established by treating fluoride-containing dusts samples generated by CVD with water-soluble separation-precipitation conversion method.The experimental results show that the relative standard deviation(n=7)was less than 1%,and recovery of standard addition were between 96.41%and 101.20%.The precision of the method meets the requirements.The proposed method was applied to the determination of ammonium fluosilicate in fluorine-containing dusts with good feasibility and practicability.