面向多品种、小批量微电子制造过程的SPC技术应用研究

Research on the Application of SPC Technology for Variety and Little Batch Microelectronics Manufacturing Process

统计过程控制(SPC)是质量管理中一种常用的工具,但由于高可靠微电子元器件生产企业绝大部分都是多品种、小批量生产,工序常规的SPC模型已经不能对这类生产型企业工序状态进行有效的监控。该文着重探讨分析一种嵌套回归SPC模型,这种SPC模型更适合成本较高的多品种、小批量生产模式,即能降低分析控制成本,又能很好地解决多品种、小批量生产统计过程控制所需数据不足的问题。

Statistical process control(SPC)is one of the most common tools used in quality management.The conventional SPC models can not monitor the process status effectively,as the variety and little batch feature of manufeturing.This paper focuses on the analysis of a nested regression SPC model,which is more suitable for variety and little batch manufeturing mode with high cost,which can reduce the cost of analysis and control,also can solve the problem of insufficient datas required by the statistical process of variety and little batch manufeturing.