基于激光自混合干涉的高精度角度测量方法

High precision angle measurement method based on laser self-mixing interference

针对光学高精度角度测量技术的需求,基于激光自混合干涉技术提出一种高精度角度测量方法。建立了激光自混合干涉技术高精度测量角度的系统模型,利用干涉条纹计数法分析出目标物体具有角度变化时,外腔长度产生的变化量,并通过激光三角法测量原理计算出目标物体旋转的角度,从而构建出精确的角度测量系统。实验结果表明:该测量系统在±0.4°角度范围内测量精度可达(±3.1×10-3)°,具有精度高、速度快等显著优势,是对现有高精度角度测量技术的一种有益补充。

Aiming at the requirements of optical high-precision angle measurement technology,a high-precision angle measurement method based on laser self-mixing interference technology is proposed.A system model of high-precision measurement angle of laser self-mixing interference technique is established.The interference fringe counting method is used to analyze the variation of the length of the outer cavity when the target object has an angular change.According to the laser triangulation measurement principle,the angle of rotation of the target object is obtained.Thereby constructing an accurate angle measuring system.The experimental results show that the measurement system can achieve measurement accuracy of(±3.1×10-3)°within±0.4°angle range,which has obvious advantages such as high precision and high speed.It is a useful supplement to the existing high-precision angle measurement technology.