两自由度碰撞结构的压电MEMS能量采集器的设计与性能测试

Design and Performance Test of Piezoelectric MEMS Energy Harvester With the Coupling Structure of Impact-type and Two Vibration Modes

为克服传统压电能量采集器工作频带窄、输出性能低等问题,提出了一种两自由度碰撞式压电能量采集器结构,建立了其理论分析模型,并利用键合与减薄技术制备了以磷青铜为基底的高性能压电厚膜,在此基础上通过MEMS工艺完成器件样机的制造。性能测试表明:在不进入碰撞机制时,最高测试加速度为5g,两自由度器件一阶、二阶谐振频率分别为26.4Hz和55.2Hz,主梁和副梁在一阶谐振、二阶谐振频率点的输出电压分别达到20.3 V/17.0 VJ8.2 V/16.5 Vo在引入碰撞机制后,在设定的4g加速度下,器件的有效输出频率为26 Hz^31 Hz和55 Hz^58 Hz两个频率范围段,有效频宽拓宽至15.6 Hz.

In order to overcome the problems of narrow operating band and low output performance of traditional piezoelectric energy harvester,a piezoelectric energy harvester with the coupling structure of impact一type and two vibration modes is proposed,and its theoretical analysis model was established.A high performance piezoelectric thick film preparation method based on bonding and thinning technology and phosphorous bronze as substrate was studied,and the device prototype was fabricated through MEMS process.When there is no set collision,the performance test shows that the first-order and second-order resonant frequencies of the device are 26.4Hz and 55.2Hz respectively when the acceleration is 5g,and the output voltages of the first-order resonance and the second一order resonance frequency of the main beam and the secondary beam are respectively 20.3 V/17.0 V,18.2 V/16.5VO When setting the collision case,The effective output frequency range of the device is 26 Hz〜31 Hz and 55 Hz-58 Hz,and the effective bandwidth is widened to 15.6 Hz.