摘要
TiB2-BN-AlN(简称TBA)复相陶瓷保持了TiB2、BN、AlN的优良性能,具备优异的化学稳定性、力学性能以及一定的导电性,主要用作真空镀铝的蒸发容器和耐腐蚀电极等。因此,概述了TBA复相陶瓷作为导电陶瓷蒸发舟的一些研究进展,重点分析了影响其致密度、导电性、力学性能(抗弯强度)和使用寿命的工艺因素;同时讨论了TBA复相陶瓷蒸发舟仍存在的问题,并对其未来发展趋势进行了展望。
Owning the excellent properties of TiB 2,BN and AlN,TiB 2-BN-AlN(TBA)composite ceramics exhibit high chemical stability,good mechanical properties and certain electrical conductivity,which are mainly used as the evaporators and corrosion-resistant electrodes for vacuum aluminum plating.The research progress of using TBA composite ceramics as conductive ceramic evaporators was summarized,and the effects of technologies on the density,electrical conductivity,mechanical properties(bending strength)and service life were analyzed;meanwhile,the existing problems and the future prospects of the TBA conductive ceramic evaporators were discussed.
作者
史晓伟
白佳海
王前
杜庆洋
张雍
魏春城)
Shi Xiaowei;Bai Jiahai;Wang Qian;Du Qingyang;Zhang Yong;Wei Chuncheng
出处
《耐火材料》
CAS
北大核心
2020年第1期77-81,共5页
Refractories
基金
山东省自然科学基金资助项目(ZR2018MEM018)
淄博校城融合计划支持项目(2017ZBXC059)
关键词
TiB2-BN-AlN复相陶瓷
蒸发舟
导电陶瓷
致密度
导电性
抗弯强度
titanium diboride-boron nitride-aluminium nitride composite ceramics
evaporators
conductive ceramics
density
conductivity
bending strength
