双阴极等离子沉积技术在TC4表面改性的应用

提高钛合金表面耐磨耐腐蚀性能是钛合金表面改性的主要研究方向,双阴极等离子溅射沉积技术具有沉积薄膜速度快,厚度容易控制等特点,在涂层制备方面被广泛应用。文章介绍了双阴极等离子溅射沉积技术的主要原理及特点,并综述了最近几年利用该技术制备涂层用于TC4表面改性方面的一些研究成果以及对未来研究方向做了一些展望。

Improving the wear resistance and corrosion resistance of titanium alloy surface is the main research of titanium alloy surface modification.The double cathode plasma sputtering deposition technology is widely used in coating preparation with the characteristics of fast deposition speed and easy control over thickness.This paper introduces the main principle and characteristics of the double cathode plasma sputtering deposition technology,and summarizes some research results in recent years and depicts for the future research prospects.