摘要
采用原位共生长化学气相沉积法,以Co3O4、MoO3、Se粉末为前驱物,710℃下在SiO2衬底上生长掺钴MoSe2纳米薄片,分析讨论氢气含量对其生长及调节机理的影响.表面形貌分析表明,氢气的引入促进了成核所需的氧硒金属化合物以及横向生长中需要的CoMoSe化合物分子的生成;AFM(Atomic Force Microscope)结果表明氢气有利于生长单层二维超薄掺钴MoSe2.随着Co3O4前驱物用量的增加,样品的拉曼和PL(Photoluminescence)谱图分别表现出红移和蓝移现象,带隙实现从1.52—1.57 eV的调制.XPS(X-ray photoelectron spectroscopy)结果分析得到Co的元素组分比为4.4%.通过SQUID-VSM(Superconducting QUantum Interference Device)和器件电学测试分析了样品的磁电特性,结果表明Co掺入后MoSe2由抗磁性变为软磁性;背栅FETs器件的阈值电压比纯MoSe2向正向偏移5 V且关态电流更低;为超薄二维材料磁电特性研究及应用拓展提供了基础探索.
In this paper,Co3O4、MoO3 and Se powders were used as precursors in in-situ co-growth chemical vapor deposition method.Cobalt-doped MoSe2 nanosheets were grown on SiO2 substrate at 710℃.The influence of hydrogen content on its growth and regulation mechanism was discussed.Surface morphology analysis showed that the introduction of hydrogen promoted the formation of oxy-selenium metal compounds required for nucleation and the CoMoSe compound molecules required for lateral growth.AFM(atomic force microscope)results show that hydrogen is beneficial to the growth of single-layer two-dimensional cobalt-doped MoSe2.With the increase of the amount of Co3O4 precursor,the Raman and PL(photoluminescence)spectra of the sample showed red shift and blue shift,respectively,and the bandgap was modulated from 1.52 eV to 1.57 eV.The XPS(X-ray photoelectron spectroscopy)results analysis showed that the elemental composition ratio of Co was 4.4%.The magneto and electric properties of the samples were analyzed by SQUID-VSM(superconducting quantum interference device)and semiconductor parameter analyzer for electrical testing.The results show that MoSe2 changes from diamagnetic to soft magnetic after Co incorporation;the threshold voltage of back gate FETs is shifted by 5 V from pure MoSe2,and the off-state current is lower.This research provides a basis for the research and application development of ultra-thin two-dimensional materials.
作者
张宝军
王芳
沈稼强
单欣
邸希超
胡凯
张楷亮
Zhang Bao-Jun;Wang Fang;Shen Jia-Qiang;Shan Xin;Di Xi-Chao;Hu Kai;Zhang Kai-Liang(Tianjin Key Laboratory of Film Electronic&Communication Devices,School of Electrical and Electronic Engineering,Tianjin University of Technology,Tianjin 300384,China)
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2020年第4期253-259,共7页
Acta Physica Sinica
基金
天津市自然科学基金(批准号:18JCZDJC30500,17JCYBJC16100,17JCZDJC31700)
国家自然科学基金(批准号:61404091,61274113,61505144,51502203,51502204)
国家重点研发计划(批准号:2017YFB0405600)资助的课题~~
关键词
二维材料
MoSe2
CO掺杂
化学气相沉积
two-dimensional materials
MoSe2
Colbat-doping
chemistry phase deposition(CVD)