激光掺杂选择性发射极技术在PERC单晶硅太阳电池中的应用

LASER DOPING SELECTIVE EMITTER TECHNOLOGY FOR HIGH EFFICIENCY PERC MONOCRYSTALLINE SILICON SOLAR CELLS

以激光掺杂选择性发射极(LDSE)技术在PERC单晶硅太阳电池中的应用为研究对象,使用太阳电池单二极管模型模拟了反向饱和电流密度与开路电压、比接触电阻与填充因子之间的关系;测试了不同激光功率和激光划线速度对扩散后方块电阻变化值的影响,并通过扫描电镜(SEM)对硅片表面形貌和电化学电容-电压(ECV)法对发射极表面浓度和结深进行了表征;采用5主栅金属化图形设计PERC单晶硅太阳电池,通过LDSE工艺参数优化,制备了平均转换效率达到21.92%的PERC单晶硅太阳电池。研究结果表明,LDSE技术可提高PERC单晶硅太阳电池的外量子效率(EQE)短波蓝光响应和转换效率。

Laser doping selective emitter(LDSE)technology is applied in the Passivated Emitter Rear Contact(PERC)solar cells.The relationship between reverse saturation current density,open circuit voltage,specific contact resistance and fill factor are simulated through a single diode model of the solar cell.The sheet resistance of emitter can be changed by applying different laser intensity and various scribing speed.Characterization of solar cells’surface doping concentration and junction depth are obtained by adopting the Electrochemical Capacitance-voltage(ECV)method.Scanning Electron Microscope(SEM)is used to observe the silicon wafer surface morphology.The average efficiency of PERC solar cells could reach to 21.92%by optimizing of the LDSE process parameters with using a 5 Bus-bar metal pattern.Moreover,LDSE technology could improve the blue response of solar cells and enhance efficiency of the solar cells.