碳碳复合材料快速沉积炉石墨加热系统设计

Design of Graphite Heating System that used in carbon-carbon Chemical Vapor Infiltration Furnace

本文以开发的碳碳复合材料快速沉积炉为依托,详细介绍碳碳复合材料快速沉积炉(CVI:Chemical Vapor Infiltration)石墨加热器的设计过程,根据设备和工艺使用要求,重点介绍加热保温系统中的加热器设计、加热器表面负荷校核、加热器应力校核。实验结果表明:所设计的石墨加热器满足生产工艺要求;项目在实际生产过程中取得了1mm/h的碳沉积速度;产品在硅单晶炉热场使用中达到了预期使用寿命,成本价与同规格石墨价格接近,满足使用要求。

This paper is based on the carbon-carbon Chemical Vapor Infiltration furnace,the design process of graphite heater for carbon-carbon Chemical Vapor Infiltration furnace is introduced in detail.According to the equipment and process requirements,the design of heater、check the load of heater surface、check stress of heater that in heating and insulation system are mainly introduced.Results show:The designed graphite heater meets the requirements of production process;The project achieved 1 mm/h carbon deposition rate in the actual production process;The expected life of the product has been achieved in the use of silicon single crystal furnace;The price and quality are close to the price and quality of graphite.