用于折射率传感的聚合物基狭缝波导的模拟与制备

Simulation and Fabrication of Polymeric Slot Waveguide for Refractive Index Sensing

设计了在极近红外波段(890 nm)的聚合物基狭缝波导微环折射率传感器.分析了波导高度、宽度及狭缝宽度对灵敏度的影响,以找到最佳的设计标准用于折射率传感.采用电子束光刻工艺制备了硅母版模,并用独特的氟化聚合物PFPE从硅母版模上成功制备了柔性软模具.采用紫外软压印工艺制备了聚合物基狭缝波导.波导的宽度和高度以及狭缝波导的宽度分别约为510 nm、830 nm和234 nm,聚合物狭缝波导残留层的厚度约为350 nm.制备的狭缝波导具有高的高宽比并与低成本批量生产工艺相兼容.

A polymer-based microring refractive index sensor based on slot waveguide was studied at very-near-infrared region(around 890 nm).The relationships between the sensitivity and the waveguide height,width and gap width were analyzed to find optimum design criteria for refractive index sensing.A silicon master mold was fabricated using electron-beam lithography.A unique class of fluorinated polymer,perfluoropolyether,was used to fabricate the flexible soft mold,which was replicated from the silicon mold successfully.The slot waveguide was fabricated on the polymer platform by using UV-based soft nanoimprint technique.The width and the height of the waveguide,and the width of the slot in the slot waveguide,are approximately 510 nm,830 nm,and 234 nm,respectively.The thickness of the residual layer of polymeric slot waveguide is approximately 350 nm.The fabricated slot walls with a high aspect ratio are shown compatible with low cost mass production processes.