杠杆耦合式微机械陀螺仪特性分析

Characteristic Analysis of Lever-coupled Micromachined Gyroscope

基于机械杠杆的位移放大效应,提出了一种具有微杠杆结构的电容检测式微机械陀螺结构,所设计的杠杆放大机构设置在陀螺的检测模态中,通过杠杆将科氏质量块的检测位移放大传递到检测框上,以提升检测位移。建立杠杆结构陀螺的二阶振动微分方程,分析了杠杆结构对微机械陀螺结构静刚度和固有频率的影响,探讨了在不同结构条件下杠杆结构对检测位移的放大效果。通过仿真验证了理论的准确性与可行性,结果表明,在陀螺谐振情况下,可有效增大检测框位移60%以上,提升了检测位移,进而提升检测灵敏度。

Based on the displacement amplification effect of lever,a capacitance detection micromachined gyroscope structure with a micro-lever structure was proposed.The designed lever amplification mechanism was set in the detection mode of the gyroscope,through which the detection displacement of Coriolis mass was amplified and transmitted to the detection frame to improve the detection displacement.The second-order vibration differential equation of lever-coupled micromachined gyroscope was established.The influence of lever on static stiffness and natural frequency of micro gyroscope was analyzed.The magnification effect of lever structure on the detection displacement under different structural conditions was investigated.The accuracy and feasibility of theoretical analysis was verified through simulation.The results showed that in the state of resonance,the displacement of detection frame can be effectively increased by more than 60%,the detection sensitivity is also improved effectively.