CVD涂层α-Al2O3织构制备技术研究

Research on Preparation Technology about Microstructure of CVD Coating α-Al2O3

采用化学气相沉积法在硬质合金基体上沉积具有不同织构择优的α-Al2O3涂层,通过扫描电子显微镜(SEM)、X射线衍射(XRD)分别对其微观组织和机械性能进行分析。研究结果表明,通过改善过渡层的氧化气氛,氧化铝的过渡层结构为针状物,成功制备不同织构的氧化铝涂层,涂层结合力良好。

α-Al2O3 coating with different texture is deposited on cemented carbide by CVD.The microstructure and mechanical properties of the coating are analyzed by SEM,XRD and so on.The results show that,by improving the oxidation atmosphere of the transition layer,the structure of the transition layer of alumina is needle like,and the alumina coating with different texture is successfully prepared with good adhesion.