精密高刚度二维气浮工作台的设计与分析

Design and Analysis of Precise Two-dimensional Aerostatic Worktable with High Stiffness

目前精密二维气浮工作台的研究,存在着二维气浮工作台的刚度和承载力较小的问题,设计了一种以精密方箱为基准的精密高刚度二维气浮工作台。该气浮工作台采用整体式气浮导轨副设计,全部构件以精密方箱为位置基准,用精密方箱自身的高平面度、平行度和垂直度来保证X轴和Y轴导轨的运行直线精度和系统刚度,并且工作台采用直线电机驱动,消除了传统机械传递带来的误差。该实验台具有机械精度高、运动直线度高、系统刚度大、安装维护容易等特点,能在精密加工、精密测量领域中广泛使用。

In the current research on precision two-dimensional aerostatic worktable,there exists the problem of small stiffness of two-dimensional aerostatic worktable.In this paper,a precision high-rigidity two-dimensional aerostatic worktable is designed based on square box.The aerostatic worktable adopts the integral aerostatic guideways design.All components are based on the ultra-precision measurement square box as the reference position.The high squareness,parallelism,and verticality are used to ensure the linear accuracy and system stiffness of the X-axis and Y-axis guideways.In addition,the platform is driven by linear motor,eliminating errors caused by traditional mechanical transmission.This worktable has the characteristics of high mechanical accuracy,high motion straightness,high system stiffness,easy installation and maintenance,etc.It can be widely used in the field of precision processing and precision measurement.