玻璃基环形振动微陀螺谐振子的设计与制造工艺

Structure Design and Fabrication of the Oscillator of a Ring Vibration Gyroscope Based on Glass

针对传统单晶硅材料热胀系数不稳定引起的硅基环形振动微陀螺的温度漂移问题,开展了玻璃基环形振动微陀螺谐振子的设计,并提出了一种新型的玻璃基准三维微结构制造工艺,借助微型电子机械系统(MEMS)工艺中成熟的深硅刻蚀、阳极键合、化学机械抛光等通用加工技术,融合玻璃熔融工艺,解决了玻璃基准三维微结构的制造工艺难题,同时保证了高的加工精度,实现了玻璃基环形振动微陀螺谐振子的高精度批量制造。

To overcome the dependence of resonant frequency on temperature arriving from silicon,we propose an oscillator of a ring vibration gyroscope based on glass.By introducing micro-electro-mechanical system(MEMS)processing technology,including deep silicon etching,anodic bonding process,chemical mechanical polishing and glass melting process,to the fabrication of the oscillator,we achieve a novel technology with high precision and high efficiency.It is suitable for mass manufacturing of micro three dimensional(3D)structures.