摘要
针对扫描投影光刻机电气安全互锁与智能诊断需求,设计了一套数据采集与监视控制系统。该系统以安全处理盒作为主要电气硬件结构,以倍福嵌入式工业PC作为主站,PLC I/O模块配置从站,采用GENESIS64组态监控软件、EtherCAT现场总线与OPC标准协议,实现了光刻机在整机控制层面上的电气安全设计以及实时诊断,为光刻机的安全运行提供了智能决策与可靠保障。
A SCADA system is designed to meet electrical safety interlock and intelligent diagnosis requirements of scanner lithography.The system uses safety handing boxes as main electrical hardware structure,Beckhoff embedded industrial PC as master station,PLC I/O modules as salve station,Genesis64 as monitoring software,EtherCAT fieldbus and OPC standard protocol.It realizes electrical safety design and real-time diagnosis of lithography machine control and provides intelligent decisions and reliable guarantee for safe operation of lithography.
作者
潘菊凤
纪松林
谢仁飚
孙嘉伟
李笑天
PAN Jufeng;JI Songlin;XIE Renbiao;SUN Jiawei;LI Xiaotian(Shanghai Micro Electronics Equipment(Group)Co.,Ltd.,Shanghai 201203,China)
出处
《电子工业专用设备》
2020年第1期15-19,49,共6页
Equipment for Electronic Products Manufacturing
关键词
光刻机
安全与诊断
以太网控制自动化技术
用于过程控制的对象连接和嵌入
Lithography
Safety and diagnosis
EtherCAT(Ethernet for Control Automation Technolo-gy)
OPC(Object Linking and Embedding(OLE)for Process Control)
