真空泵微小抽速测试方法研究进展与分析

Measurement Methods for Micro Pumping Speed of Vacuum Pump: A Review Study

基于真空泵发展的实际需求,本文对真空泵微小抽速测试方法的研究现状与进展进行全面论述。首先,从三种常用的测试方法(流量计法、定容法和动态流导法)具体展开。通过回顾国内外学者的典型应用案例,分别介绍其测试原理与特点;接下来,讨论微小抽速的测试方法的难点及其应对策略,并对这几种测试方法进行对比分析,最后,就不同压力条件与测试方法的选用关系给出建议。同时,本文也提出未来可在真空泵极小抽速(<10-5 m3/s)的精确测试和拓展测试气体的种类两方面开展进一步研究,以推动真空计量基础科研的跨越式发展。

The latest development of the measurement methodology of micro pumping speed for vacuum pumps was tentatively reviewed.Firstly,the operation principles,strengths and weaknesses of the commonly used techniques reported in literature,including the flow meter method,static volume method and dynamic flow method,were discussed with specific application examples.Next,the limitations,difficulties,problems and solutions of these measurement methods were analyzed.And finally,suggestions on selection of the measurement methods in specific realistic situations,were made. In addition,the development trends,in theoretical and experimental studies of micro pumping-speed evaluation methodology,were also briefly discussed.To be specific,when it comes to micro-pumping speed measurement,two interesting subjects were proposed: one is how to exactly determine the lower limit(< 10-5 m3/s),and the other is how to deal with gases other than H2 and N2,such as gas-mixtures and nobles.