微机电系统集成设计方法与实现技术分析

Analysis of Microelectromechanical Systems Integrated Design Method and Implementation Technology

微机电系统是一个独立的智能系统,以微电子技术为基础,融合了光刻、腐蚀、硅微加工等技术。目前,在微电系统设计中还存在多学科交叉问题以及设计周期较长的问题,影响了微机电系统的设计效率。笔者阐述了微机电系统的研究背景,并介绍了微机电系统的相关内容,总结了微机电系统设计过程中的关键技术。

MEMS is an independent intelligent system based on microelectronics technology that combines lithography,etching,silicon micromachining and other technologies.At present,there are multi-disciplinary cross-cutting problems and long design cycles in the design of micro-store systems,which affect the design efficiency of MEMS.The author expounds the main characteristics of MEMS,and proposes a two-way design method from top to bottom and from low to high,and also summarizes the key technologies in the design process of MEMS.