摘要
利用轴向气相沉积法制备高掺F光纤预制棒过程中,CF4作为掺F源,在高温状态下,对所接触到的玻璃器皿产生腐蚀作用。本文研究了CF4气体在沉积过程对喷灯的腐蚀规律;CF4气体在玻璃化过程中对玻璃化炉的腐蚀。
In the process of fabricating high F-doped optical fiber preform rod by axial vapor deposition,CF4 as the doped F source,and corrodes the glass containers at high temperature.In this paper,the corrosion rule of CF4 gas to blowtorch in deposition process and the corrosion of CF4 gas to glass furnace in vitrification process are studied.
出处
《现代传输》
2020年第1期78-79,共2页
Modern Transmission
