基于位移补偿的离面位移实时追踪算法

Real-time tracking algorithm of out-of-plane displacement based on displacement compensation

本文提出一种基于位移补偿的离面位移实时追踪算法,并给出基于卷积全场最大值和基于卷积局部极大值两种计算方法。将位移前后的干涉条纹图子区与Gabor模板进行卷积匹配,得到与相应子区重合的模板,计算模板位相变化量,求得位移大小及方向;再利用锆钛酸铅压电陶瓷(PZT)对位移进行同步追踪补偿,实现离面位移测量。文中分别进行了镜面干涉追踪实验以及散斑干涉追踪实验,验证了本算法在大量程、高分辨率、实时测量以及抗噪声等方面的可靠性与有效性。

A real-time tracking algorithm of out-of-plane displacement based on displacement compensation is proposed. Two calculation methods based on full-field and local convolution maximum values are given, respectively. Gabor template is used for matching with subset of interference fringe patterns before and after displacements, so corresponding Gabor templates can be obtained. The value and direction of displacements can be obtained through calculating the phase shift of these two templates. Moreover, the PZT is used to track and compensate the displacement in real time for measuring the out-of-plane displacement. Mirror interferometry tracking experiments and speckle interferometry tracking experiments are carried out to verify the reliability and effectiveness of this algorithm. The results show that the algorithm can achieve large scale, high resolution, real-time measurement and also has the advantage of anti-noise.