微型溅射离子泵极小抽速精确测量的意义和难点

Significance and Difficulty of Precise Measurement of Micro-sputtering Ion Pump

抽速小于10-4 m^ 3/s量级的微型溅射离子泵在航天载荷产品、电子器件、科学仪器领域应用广泛,现有的抽速测量方法都大于10-2 m^3/s量级,无法解决极小抽速精确测量的急需。制约抽速测量的主要原因是测量用电离真空计本身的抽速在10-5~10-4 m ^3/s量级,与被测微型真空泵抽速在同一数量级,以及现有测量方法无法适用于极小抽速的测量。在论述微型溅射离子泵极小抽速测量的重要意义及分析其难点的基础上,调研了极小抽速测量研究的最新进展,提出了极小抽速测量的构想,期望能为实现微型溅射离子泵极小抽速的精确测量提供帮助。

Micro-sputter ion pump with pumping speed less than 1×10^-4 m^3/s is widely used in the filed such as space payloads,electronic devices,scientific instruments and so on.The lower limit of existing vacuum pumping speed measurement standards is greater than 1×10^-2 m^3/s,which cannot solve the urgent need of accurate measurement of minimum pumping speed.The main reasons that the lower limit for measurement is the pumping speed of the ionization vacuum gauge is on the magnitude of 10-4~10^-5 m ^3/s,which is the same order of magnitude for the pumping speed of the micro vacuum pump,and the existing measurement methods can’t be applied to the measurement of minimum pumping speed.On the basis of discussing the importance and difficulty of the minimum pumping speed measurement of micro sputtering ion pump,the latest development of the measurement of the minimum pumping speed is investigated.The conception of the minimum pumping speed measurement is put forward,which can provide help for the accurate measurement of the minimum pumping speed of micro-sputtering ion pump.