极端电场环境激励下的VO2相变性能研究与应用

Research and application of VO2 phase transition performance under extreme electric field environment excitation

为揭示VXOY薄膜场致相变规律,推广钒氧化物应用于卫星控制系统,指导氧化钒规模制备,将磁控溅射法和真空退火工艺相结合,在Al2O3陶瓷基片上制备出VXOY薄膜,降低了实验对仪器精度的要求,提高了实验的成功率。对基片进行磁控溅射镀膜,在管式炉中进一步氧化处理生成表面均匀的V2O5,然后进行高温退火处理,对不同退火条件下的生成的薄膜进行了XRD表征。测得了电场激励下VXOY薄膜的相变现象,验证了电场激励下焦耳热并非薄膜相变的主导因素;总结了不同组分下VXOY薄膜的相变规律,研究了不同V6O13含量对VO2薄膜临界相变电压的影响规律,可指导VXOY薄膜应用于微纳卫星等极端环境下的设备控制系统。

In order to reveal the field-induced phase change law of VXOY film,the vanadium oxide was applied to the satellite control system to guide the scale production of vanadium oxide.The magnetron sputtering method and the vacuum annealing process were combined to prepare the VXOY film on the Al2O3 ceramic substrate.The experimental requirements for instrument accuracy improved the success rate of the experiment.The substrate was subjected to magnetron sputtering coating,further oxidized in a tube furnace to form a uniform surface V2O5,and then subjected to high temperature annealing treatment,and the formed film under different annealing conditions was characterized by XRD.The phase transition of VXOY film under electric field excitation was measured.It was verified that Joule heat was not the dominant factor of film phase transformation under electric field excitation.The phase transformation of VXOY film under different compositions was summarized.The different V6O13 content was studied for the critical phase of VO2 film.The influence law of the variable voltage could guide the VXOY film to be applied to control systems under extreme environmental equipment such as micro-nano satellites.