摘要
通过结合光学MEMS(Micro Electro-Mechanical System)技术对三维测量系统进行了深入研究,分析了基于MEMS的三维测量系统测量原理,完成了三维测量系统核心器件选择及测量系统的搭建,对三维测量系统的三维结构进行了设计,并对安装壳体三维结构图、器件安装板安装示意图以及测量系统整体装配效果图进行了绘制。
In this paper,the three-dimensional measurement system is deeply studied by combining Micro MEMS(Micro Electro-Mechanical System)technology.The measurement principle of MEMS-based 3D measurement system is analyzed,the core device selection of 3D measurement system and the construction of measurement system are completed.The three-dimensional structure of the system was designed,and the three-dimensional structure diagram of the mounting shell,the installation diagram of the device mounting board,and the overall assembly effect diagram of the measuring system were also drawn.
作者
杨学文
敖良忠
马瑞阳
YANG Xue-wen;AO Liang-zhong;MA Rui-yang(Aviation Engineering College,Civil Aviation Flight University of China,Guanghan 618307,China)
出处
《机械工程与自动化》
2020年第1期171-173,176,共4页
Mechanical Engineering & Automation
关键词
MEMS
三维测量
相移法
MEMS
three-dimensional measurement
phase shift method
