摘要
本文以自主研发的刻蚀工序自动化设备为基础,针对刻蚀工序后自动化传输中容易产生的划痕缺陷,提出了解决办法,即采用翻转机构将刻蚀面朝上放置避免其与传送带接触,并分析了翻转过程中吸盘印产生的主要原因,并通过大量试验制定出解决吸盘印的有效措施。
Based on the etching process automation equipment developed by ourselves,this paper analyzes the main causes of sucker printing,and develops effective measures to solve the problem,that is,to use a turning mechanism to place the etching face upward to avoid contact with the conveyor belt,and analyzes the main causes of sucker seal in the turning process,and through a large number of experiments,develops effective measures to solve the problem.
作者
吕沫
Lv Mo(The 2nd Research Institute of CETC,Taiyuan Shanxi 030024,China)
出处
《山西电子技术》
2020年第1期26-28,共3页
Shanxi Electronic Technology
关键词
刻蚀
缺陷
吸盘印
etching
defects
suction cup printing