一种等离子体压电谐振式MEMS红外探测器的理论研究

Theory Research of a Plasmon Piezoelectric Resonant MEMS Infrared Detector

基于氮化铝兰姆波谐振器的频率温度效应,研究了一种等离子体压电谐振式MEMS红外探测器。利用表面集成的等离体超表面光栅结构实现对红外辐射的超高吸收,进而器件温度升高引起其信号频率发生偏移,实现红外探测。采用有限元仿真和理论分析相结合的方法,对器件红外吸收性能、电学性能、热学性能等进行系统地优化。基于优化研究的结构尺寸参数,仿真结果表明该器件具有优异的性能,可实现高速、高灵敏红外探测。

Based on the temperature effect of frequency of AlN Lame-wave resonators,a plasmon piezoelectric resonant MEMS infrared detector was researched in this paper.Plasmon metasurface gratings were integrated on the device surface to achieve ultra-high infrared absorbance,and then the increasing of device temperature would induce the resonant-frequency drift to realize infrared detection.Combined with finite-element simulation and theoretical analysis,the device performances,including infrared absorption,electrical performance,and thermal performance,were systematically optimized.With the optimum research of the structural dimension parameters,the simulation results demonstrate that the device has outstanding performances to realize infrared detection with high speed and sensitivity.