摘要
在室温条件下,采用磁控溅射技术在玻璃衬底上生长了AZO/Ag/AZO多层透明导电薄膜。主要研究了Ag层厚度对多层透明导电薄膜结构和性能的影响。研究表明,AZO和Ag分别延(002)面和(111)面高度择优生长,随着Ag层厚度的增加,多层透明导电薄膜的电阻率不断降低,透过率呈现先降低再增加最后再降低的变化趋势,其中Ag层厚度为8nm的样品获得最大品质因子33.1×10^-3Ω^-1,综合性能最佳。
AZO/Ag/AZO multilayer transparent conductive films were grown on glass substrate by magnetron sputtering at room temperature.The effect of Ag layer thickness on the structure and properties of the multilayer transparent conductive films were mainly studied.The results show that AZO and Ag have preferred orientation to the(002) and(111) planes,respectively,and the resistivity of the multilayer transparent conductive films decrease with the increase of the Ag layer thickness,while the transmittance is reduced first,then increased,and then decreased.The sample with Ag layer thickness of 8 nm shows the maximum figure of merit value of 33.1×10^-3-1,and the overall performance was the best.
作者
李明亮
刘利
沈燕
LI Ming-liang;LIU Li;SHEN Yan(Chongqing Institute of Metrology and Quality Inspection,Chongqing 401120,China;Material Science and Engineering School,Kunming University of Science and Technology,Kunming 650093,China)
出处
《真空》
CAS
2020年第1期31-34,共4页
Vacuum
