摘要
本文考察了 MoS_2-LaF_3共溅膜在潮湿空气中贮存后结构及摩擦学性能的变化。结果表明,少量稀土化合物使共溅膜组织更加致密,防止了底材腐蚀,稳定了薄膜结构,MoS_2-LaF_3共溅膜经潮湿贮存后仍具有长的耐磨寿命和稳定的摩擦系数。
The tribological properties of MoS_2-LaF_3 cosputtered films after stored inmoist air(100%RH)were investigated in this paper.The texture and structure of the films werecharacterized by SEM,TEM and XRD techniques.The tribological properties of the films werestudied in vacuum(0.77mPa)and air(11—15℃,35—45%RH)environments.The results showthat the MoS_2-LaF_3 cosputtered film has long wear life and stable friction coefficient afterstored in moist air for a period of time and has denser texture and stable structure when there issmall amount of rare earth compound in the film.The denser texture protects the substrate fromcorrosion and prolongs the wear life of film,and the stable struture makes the film's frictioncoefficient stable.
基金
国家自然科学基金
59072092
关键词
薄膜
贮存
共溅膜
潮湿
MoS_2-LaF_3cosputtered film
humidity
structure
texture
tribological property
