半导体器件生产车间通风洁净空调系统节能分析

Energy saving analysis of ventilation and clean air conditioning system in semiconductor production workshop

随着国内半导体器件技术不断发展和广泛应用,使得洁净车间空调系统的节能成为关注和研究的焦点问题.通过对半导体器件生产车间空调系统的特点进行了分析,并以某工程为例,说明该类空调系统能耗大的现状.在此分析基础上,从将室外新风与室内回风分离、调节减小系统送风量,利用变频技术优化控制系统及运行管理等方面,提出解决洁净系统运行节能的思路及措施.

With the continuous development and widespread application of domestic semiconductor device technology,the energy saving of air-conditioning systems in clean workshops has become the focus of attention and research.Through the analysis of the characteristics of the air-conditioning system in the semiconductor device production workshop,and taking a certain project as an example,the current situation of large energy consumption of this type of air-conditioning system is illustrated.On the basis of this analysis,from the aspect of separating outdoor fresh air from the indoor return air,adjusting and reducing the air supply volume of the system,using frequency conversion technology to optimize the control system and operation management,the ideas and measures for solving the energy saving operation of the clean system are proposed.