一种谐振式加速度计的稳定性分析方法

A kind of stability analysis method for the resonant accelerometer

谐振式加速度计的振动稳定性,是加速度计的重要性能指标之一,对测量精度和可靠性有重要影响。本文以谐振式加速度计敏感结构的振动稳定性为研究对象,研究其结构参数对谐振梁振动稳定性的影响。首先分析谐振式加速度的敏感机理,构建谐振梁动力学数学模型;利用小参数摄动法求解谐振梁动力学数学模型的一般近似解,为谐振梁的振动稳定性提供理论基础;针对2种典型轴向力,求得谐振梁动力学模型稳定性区间的过渡曲线,定量分析谐振梁振动稳定性与加速度计结构参数之间的对应关系;依据稳定性分析结论对设计的加速度计进行1g静态翻滚验证实验。研究结果表明,稳定性分析为优化设计加速度计结构参数提供有效的理论依据。

The vibration stability is one of the important performances of resonant accelerometer,which has an important impact on measurement accuracy and reliability.In this paper,the sensitive structure vibration stability of the resonant accelerometer is taken as the research object,and the influence of structural parameters on the resonant beam vibration stability is studied.First of all,the sensitive mechanism of resonant accelerometer is analyzed,and the dynamic mathematical model of resonant beam is constructed.Then the general approximate solution of the vibration beam dynamic mathematical model is solved by the means of small parameter perturbation,which provides a theoretical basis for the resonant beam vibration stability.In the condition of two typical axial forces,the transition curve of stability range for the dynamic mathematical model is obtained,which makes it possible for a quantitative analysis of the corresponding relationship between the resonant beam vibration stability and the accelerometer structural parameters.Finally,according to the conclusion of stability analysis,the 1g static rolling test is performed on the accelerometer.The research results show that stability analysis provides effective theoretical foundation for optimizing the accelerometer structural parameters.