电感耦合等离子体原子发射光谱法测定工业硅中磷的不确定度评定

Uncertainty Evaluation in the Determination of Phosphorus in Industrial Silicon by ICP-OES

对电感耦合等离子体原子发射光谱(ICP-OES)法测定工业硅中磷的不确定度来源进行了详细分析,依次对测量重复性、测量溶液浓度、样品溶液体积、样品称量以及回收率产生的不确定度进行了评定,合成了标准不确定度,最后获得测量结果的扩展不确定度,结果表明测量重复性引入的不确定度贡献最大。

The source of uncertainty in the determination of phosphorus in industrial silicon by ICP-OES is analyzed in detail.The uncertainty in measurement repeatability,concentration,volume,weighing and recovery of sample solution are evaluated in turn.The standard uncertainty is synthesized.The expanded uncertainty of measurement results is obtained.The results show that The uncertainty contribution of measurement repeatability is the largest.