基于选择性抽气原理的超灵敏检漏方法分析

Analysis of Ultra-sensitive Leak Detection Method Based on Selective Gas Pumping Character

随着科研生产对仪器设备精密程度与长寿命要求的不断提高,对超灵敏检漏需求的不断增加,氦质谱检漏仪已无法完全满足要求。利用超高真空材料处理降低本底氦信号,采用非蒸散型吸气剂泵选择性抽气实现静态真空的维持,运用静态累积比较法放大被检件的氦信号,实现了对10-13~10-15 Pa·m3/s极小漏率的检测。依据改进方案设计的超灵敏检漏仪和极小气体流量校准装置,为航空航天、核工业等多家单位的产品提供了可靠性保证。

With the development of scientific research and production,the requirement of precision and long life of instruments is increasing.But the existing helium mass spectrometer leak detector can’t meet the requirements.The ultrahigh vacuum system material processing is used to reduce the background helium signal,non-evaporable getter pump is chosen to maintain static vacuum by selective pumping and static accumulation comparison method is used to amplify helium signal.The detection of 10-13~10-15 Pa·m3/s very low leakage rate is realized.The ultra sensitive leak detector and the very low gas flow calibration device designed according to the improved scheme provide reliability guarantee for the products of many companies in aerospace,nuclear industry and other industries.