微型傅立叶变换光谱仪的优化设计与实验研究

Optimization design and experimental study of micro-Fourier transform spectrometer

为了实现傅立叶变换光谱仪的微型化与轻量化,设计了轻型栅条分束器结构,代替传统的平行平板分束器,分析了轻型栅条分束器的栅棱对光谱复原的影响,提出了制作误差容限。对微型傅立叶变换光谱仪进行了建模仿真,得到了轻型栅条分束器的最佳结构。通过系统仿真进行光谱反演,得到了复原光谱,并计算了轻型栅条分束器引入的光谱误差。完成了原理样机的搭建与调试,得到了实际系统的复原光谱,证明了微型化系统的可行性。该微型化系统相对于传统傅立叶变换光谱仪,具有体积小,稳定性好的优点,可用于在线监测。

In order to achieve the goal of miniaturization and light weight of Fourier transform spectrometer,a light-weight grid beam splitter structure was designed instead of the traditional parallel plate beam splitter.The influence of the grid edge of the grid beam splitter on spectrum reconstruction was analyzed,and the tolerance of production error was proposed.The micro-Fourier transform spectrometer was modeled and simulated,and the optimal structure of the grid beam splitter was obtained.The spectral inversion was performed by system simulation,and the restored spectrum was obtained.The spectral error introduced by the grid beam splitter was calculated.The construction and debugging of the prototype was completed,and the recovered spectrum of the actual system was obtained,which proved the feasibility of the miniaturized system.Compared with the traditional Fourier transform spectrometer,the miniaturization system has the advantages of small volume and good stability,and can be used for online monitoring.