微型晶振平行缝焊平台误差建模及分析

Research on error modeling of parallel seam welding platform for micro crystal resonator

平行缝焊平台的误差分析对于微型晶体谐振器封装质量具有重要意义。针对平台的精度需求,分析了误差源,确定了误差传递主路径;基于误差的传递规律以及平台结构特点,改进了齐次坐标变换方法,建立3个特征坐标系,并分析加工误差和装配误差对平台位置误差的影响;建立平行缝焊平台中X-Y平面和Z轴方向零件装配时的误差模型,并基于这两个基本模型建立平行缝焊平台的位置误差通用模型;通过MATLAB软件上对所建立的误差模型进行仿真分析,验证了模型的正确性,并在满足重要尺寸精度要求的前提下,求得了允许的误差变化范围。

Error analysis of parallel seam welding platform is of great significance for packaging quality in micro-crystal resonator.Aiming at the accuracy requirement of the platform,its error sources are analyzed and the main line of error transmission is determined.Based on the error transferring rules and the platform’s structure,the homogeneous coordinate transformation method is improved by establishing three characteristic coordinate systems,and the influence of machining error and assembly error on the platform’s position error is analyzed.The assembly error models of the X-Y plane and Z-axis direction in the seam welding platform are set up,and the general position error model of the platform is given by integrating the above two basic models.The general error model obtained is simulated and analyzed by MATLAB,which verifies the model correctness and obtains the allowable error variation range with satisfying the important dimensional accuracy requirements.