MEMS惯性传感器研究现状与发展趋势

Status and development trend of MEMS inertial sensors

基于MEMS(Micro-Electro-Mechanical System)技术的惯性传感器具有重量轻、成本低、体积小等优点,在民用、航天及军事领域有着极其广阔的应用和发展前景。伴随着MEMS技术的快速发展,MEMS惯性传感器各项性能指标也得到了显著提升。对MEMS陀螺仪、MEMS加速度计以及MEMS惯性测量单元(IMU)的基本工作原理、分类及研究现状进行梳理,并对其发展趋势进行了分析与展望。

Inertial sensors based on MEMS(Micro-Electro-Mechanical System)technology have the advantages of light weight,low cost,small size,etc.,they have extremely broad application and development prospects in civil,aerospace and military fields.With the rapid development of MEMS technology,the performance indicators of MEMS inertial sensors have also been significantly improved.The basic working principle,classification and research status of MEMS gyroscope,MEMS accelerometer and MEMS inertial measurement unit(IMU)are sorted out and the development trend of MEMS gyroscope,MEMS accelerometer and MEMS inertial measurement unit are analyzed and forecasted.