微米级PZT驱动器尺度相关的自由振动分析

Analysis of Size-dependent Free Vibration of Micro-scale PZT Driver

根据修正偶应力理论和哈密顿原理,并结合经典的层合梁理论,推导出具有层合结构、考虑力-电耦合作用的微米级均质、非均质锆钛酸铅(PbZrTiO3,PZT)智能驱动器尺度相关的运动控制方程和固有频率。通过引入的材料内禀特征尺寸参数,成功捕获了微米级PZT智能驱动器的尺寸效应。数值分析显示,不同基体材料对微米级均质、非均质PZT智能驱动器归一化固有频率影响较小;压电层厚度不变,随着基体厚度增加,微米级PZT驱动器尺寸效应逐渐变小;随着结构特征尺寸逐渐增大,尺寸效应逐渐消失。

Based on the modified couple stress theory and Hamilton principle,and combining the classical laminated beam theory,the motion control equations and natural frequencies of micro-scale homogeneous and heterogeneous PZT intelligent drivers with laminated structure are derived in considering the mechanical-electrical coupling effect.By introducing the intrinsic feature size parameters of materials,the size effect of the micro-scale PZT drivers is successfully captured.The numerical analysis results show that different substrate materials have little influence on the normalized natural frequency of micro-scale homogeneous and heterogeneous PZT intelligent actuators.With the increase of the thickness of substrate layer,the size effect of micro-scale PZT drivers decrease gradually as the thickness of the piezoelectric layer does not change.With the increase of feature size of the PZT structure,the size effect gradually disappears.