涡轮导叶片表面MEMS高温测量技术

MEMS Sensors for High Temperature Measurement on Nozzle Guide Vane Surface

利用MEMS微制造集成技术,在航空发动机涡轮叶片表面成功地制作了薄膜高温温度传感器,攻克了叶片表面高温绝缘、曲表面光刻及高温可靠导线互联等一系列关键技术难关。对薄膜传感器及高温连线系统进行了一系列温度循环测量试验,读数可靠稳定、重复性好,并承受住了苛刻的振动冲击试验(10~2000Hz/40g的振动及8g的半正弦波冲力试验)。该涡轮叶片表面MEMS原位集成热电偶薄膜传感器也经历了温度高达1200℃的航空发动机燃动环境下燃气压力0.5MPa、热流量1.24L·J/(kg·K)的测试,获得了可靠的气动环境温度。该传感器尺寸小而且可以批量地形成传感器阵列,尽可能地避免了传感器对气动环境的扰动及叶片本身的破坏,而且便于安装和连接,可以用于航空发动机涡轮部位的高温温度测量。

Thin film high temperature sensors have been successfully fabricated on the surface of aero-engine turbine blade by the aid of MEMS micro manufacturing technology. A series of key challenges such as high temperature insulation, lithography on the curved surface, high temperature interconnection have been overcome during the endeavor of the sensor development. The thin film sensor together with the connecting wires can stand for the tough vibration and shocking test(10-2000 Hz/40 g vibration intensity and 8 g semi-sinusoidal impulse shocking test). The embedded thin film MEMS thermocouple sensor is also capable to detect the high temperature up to 1200℃ in the burning air flow inside aeroengine combustion chamber. The advantage of these thin film sensors is small in size and easy to install, therefore avoiding the disturbance to the environment and less destruction to the blade as possible. They can also be made in batch to form a sensor array for high temperature distribution studies.