一维4H-碳化硅光栅红外光学特性及红外尺应用

Infrared optical properties of one-dimensional 4H-SiC gratings and its nano-ruler application

从理论和实验上对极化材料4H-SiC一维光栅的光学特性进行了研究。发现该结构中存在四种光学模式:传播表面声子极化激元、偶极子天线、局域表面声子极化激元和准静态表面声子极化激元。进一步利用传播表面声子极化激元对于光栅结构参数的敏感性和原子层沉积技术生长介质材料,观察到了沉积材料厚度变化和传播表面声子极化激元的峰位偏移量呈现线性关系。该研究有助于新型微纳器件如纳米尺、传感器等的开发。

The optical properties of one-dimensional 4 H-SiC gratings have been studied both theoretically and experimentally.Four optical modes are observed in the grating structure:propagating surface plasmon polaritons(PSPhPs),dipole mode,localized surface phonon polaritons and quasi-static surface phonon polaritons.Furthermore,dielectric materials with various thicknesses were deposited on the grating surfaces by the atomic layer deposition.By utilizing the sensitivity of the PSPhPs mode to the parameters of the grating structure,a linear relation between the change of the thickness of the deposited materials and the offset of the PSPhPs peak position has been observed and deduced.These findings here could provide guidance for various applications of novel micro/nano devices,such as the nano-ruler and nano-sensor.