摩擦后清洗机对Zara不良的影响和改善

Influence and improvement of After-Rubbing-Cleaner on Zara

在液晶显示面板行业,边缘场开关技术在生产过程中易导致Zara不良的高发,降低产品良率,导致生产成本增加。Zara不良根据点灯现象可以分为散状Zara、团状Zara、辉点数和未确认面板污渍类4类。经大量取屏分析,发现Zara不良与摩擦后清洗机的内部洁净度和清洗能力有较大关联。本文从过滤器滤径减小、KOH流程优化、直供水改造、腔室污染降低等方面进行了改善研究,通过机理分析和大量试验验证,将Zara不良由0.74%改善至0.24%,验证了提升摩擦后清洗机洁净度对Zara不良改善有重要作用,同时也取得了良好的经济效益:年收益1 338万元。

In the TFT-LCD industry,Fringe Field Switching(FFS)technology in the production process is easy to lead to the high incidence of Zara,reduces the product yield and increases the production cost.According to the phenomenon of lighting,the defects of Zara can be divided into four categories:scattered Zara,clustered Zara,bright spots and unconfirmed bad stains of panel.Through a large number of screen analysis,it is found that Zara is closely related to the internal cleanliness and cleaning capacity of After-Rubbing-Cleaner.This paper studies the improvement of filter diameter reduction,KOH process optimization,direct water supply transformation,chamber pollution reduction and so on.Through mechanism analysis and a large number of tests,Zara is improved from 0.74%to 0.24%.It is verified that the cleaning degree of After-Rubbing-Cleaner is important to improve Zara.At the same time,good economic benefits are obtained:the annual income is 13.38 million yuan.