一种X射线数字成像检测缺陷尺寸的测量方法

A method for measuring defect size by X-ray digital imaging detection

提出了一种X射线数字成像检测缺陷尺寸的测量方法。借鉴半波高法,以半波高法下的尺寸测量误差为基准,对不同缝隙尺寸试样在相同的检测条件下进行X射线数字成像检测,计算该检测条件下的总不清晰度,总结出缺陷尺寸与总不清晰度比值同波高比例的关系,并通过试验进行了验证。结果表明,该方法简单、实用性强,可为实现缺陷尺寸的准确测量提供技术支持。

A defect size measurement method based on X-ray digital imaging is proposed.Based on the half-wave height method and taking the dimension measurement error under the half-wave height method as the reference,Xray digital imaging testing was carried out on the specimens with different slot sizes under the same testing conditions.The total ambiguity value under the same testing conditions was calculated,and the relationship between the ratio of defect size to total ambiguity and the ratio of wave height was summarized.The method was verified by the test.The results showed that the method was simple and practical and could provide technical support for accurate measurement of defect size.