摘要
The eight-band κ·p model is used to establish the energy band structure model of the type-II InAs/GaSb superlattice detectors with a cut-off wavelength of 10.5μm,and the best composition of M-structure in this type of device is calculated theoretically.In addition,we have also experimented on the devices designed with the best performance to investigate the effect of the active region p-type doping temperature on the quantum efficiency of the device.The results show that the modest active region doping temperature(Be:760℃)can improve the quantum efficiency of the device with the best performance,while excessive doping(Be:>760℃)is not conducive to improving the photo response.With the best designed structure and an appropriate doping concentration,a maximum quantum efficiency of 45% is achieved with a resistance-area product of 688?·cm^2,corresponding to a maximum detectivity of 7.35×10^11cm·Hz^1/2/W.
作者
崔素宁
蒋洞微
孙矩
贾庆轩
李农
张璇
李勇
常发冉
王国伟
徐应强
牛智川
Su-Ning Cui;Dong-Wei Jiang;Ju Sun;Qing-Xuan Jia;Nong Li;Xuan Zhang;Yong Li;Fa-Ran Chang;Guo-Wei Wang;Ying-Qiang Xu;Zhi-Chuan Niu(State Key Laboratory for Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China;School of Energy and Environment Science,Key Laboratory of Renewable Energy Advanced Materials and Manufacturing Technology(Ministry of Education),Provincial Key Laboratory of Optoelectronic Information Technology,Yunnan Normal University,Kunming 650092,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;Beijing Academy of Quantum Information Sciences,Beijing 100193,China)
基金
Project supported by the National Key Technology R&D Program of China(Grant No.2018YFA0209104)
the Key R&D Program of Guangdong Province,China(Grant No.2018B030329001)
the Major Program of the National Natural Science Foundation of China(Grant No.61790581)。
